|
 |
 |
|
主要技术参数;
|
机组型号
|
泵型号 |
抽气速率
|
极限压力
|
进气口径
(mm)
|
出气口径
(mm)
|
电机功率 |
主泵
|
前级泵
|
主泵
|
前级泵
|
| Ⅰ |
Ⅱ |
Pa |
Torr |
Ⅰ |
Ⅱ |
| JZPS150-3 |
ZJP-150 |
- |
2SK-3 |
150 |
2.7 |
2 |
100 |
50 |
2.2 |
- |
7.5 |
| JZPS150-1 |
ZJP-150 |
- |
2SK-6A |
150 |
2.7 |
2 |
100 |
50 |
2.2 |
- |
11 |
| JZPS300-3 |
ZJP-300 |
- |
2SK-6A |
300 |
2.7 |
2 |
150 |
50 |
4 |
- |
11 |
| JZPS150-21 |
ZJP-150 |
ZJP-70 |
2SK-3 |
150 |
6.7×10-1 |
5×10-1 |
100 |
50 |
2.2 |
1.1 |
7.5 |
| JZPS300-21 |
ZJP-300 |
ZJP-150 |
2SK-6A |
300 |
6.7×10-1 |
5×10-1 |
150 |
50 |
4 |
2.2 |
11 |
| JZPS300-41 |
ZJP-300 |
ZJP-70 |
2SK-3 |
300 |
6.7×10-1 |
5×10-1 |
150 |
50 |
4 |
1.1 |
7.5 |
| JZPS600-41 |
ZJP-600 |
ZJP-150 |
2SK-6A |
600 |
6.7×10-1 |
5×10-1 |
200 |
50 |
7.5 |
2.2 |
11 |
| JZPS1200-43 |
ZJP-1200 |
ZJP-300 |
2SK-6A |
1200 |
6.7×10-1 |
5×10-1 |
250 |
50 |
11 |
4 |
11 |
| JZPY150-3 |
ZJP-150 |
- |
2YK-3 |
150 |
6.7×10-1 |
5×10-1 |
100 |
50 |
2.2 |
- |
7.5 |
| JZPY300-3 |
ZJP-300 |
- |
2YK-6 |
300 |
6.7×10-1 |
5×10-1 |
150 |
50 |
4 |
- |
11 |
| JZPY150-21 |
ZJP-150 |
ZJP-70 |
2YK-3 |
150 |
5×10-3 |
3.8×10-3 |
100 |
50 |
2.2 |
1.1 |
7.5 |
| JZPY300-21 |
ZJP-300 |
ZJP-150 |
2YK-6A |
300 |
2.6×10-3 |
2×10-3 |
150 |
50 |
4 |
2.2 |
11 |
| JZPY300-41 |
ZJP-300 |
ZJP-70 |
2YK-3 |
300 |
5×10-3 |
3.8×10-3 |
150 |
50 |
4 |
1.1 |
7.5 |
| JZPY600-41 |
ZJP-600 |
ZJP-150 |
2YK-6A |
600 |
2.6×10-3 |
2×10-2 |
200 |
50 |
7.5 |
2.2 |
11 |
| JZPY1200-43 |
ZJP-1200 |
ZJP-300 |
2YK-6A |
1200 |
2.6×10-3 |
2×10-2 |
250 |
50 |
11 |
4 |
11 |
| JZPS150-1P |
ZJP-150 |
- |
2SK-6AP |
150 |
4×10-1 |
3×10-1 |
100 |
50 |
2.2 |
- |
11 |
| JZPS150-3P |
ZJP-150 |
- |
2SK-3P |
150 |
4×10-1 |
3×10-1 |
100 |
50 |
2.2 |
- |
7.5 |
| JZPS300-3P |
ZJP-300 |
- |
2SK-6AP |
300 |
4×10-1 |
3×10-1 |
150 |
50 |
4 |
- |
11 |
| JZPS150-21P |
ZJP-150 |
ZJP-70 |
2SK-3P |
150 |
2×10-2 |
1.5×10-2 |
100 |
50 |
2.2 |
1.1 |
7.5 |
| JZPS300-21P |
ZJP-300 |
ZJP-150 |
2SK-6AP |
300 |
2×10-2 |
1.5×10-2 |
150 |
50 |
4 |
2.2 |
11 |
| JZPS300-41P |
ZJP-300 |
ZJP-70 |
2SK-3P |
300 |
2×10-2 |
1.5×10-2 |
150 |
50 |
4 |
1.1 |
7.5 |
| JZPS600-41P |
ZJP-600 |
ZJP-150 |
2SK-6AP |
600 |
2×10-2 |
1.5×10-2 |
200 |
50 |
7.5 |
2.2 |
11 |
| JZPS1200-41P |
ZJP-1200 |
ZJP-300 |
2SK-12P |
1200 |
2×10-2 |
1.5×10-2 |
250 |
80 |
11 |
4 |
22 |
| JZPS600-21P |
ZJP-600 |
ZJP-300 |
2SK-12P |
600 |
2×10-2 |
1.5×10-2 |
200 |
80 |
7.5 |
4 |
22 |
|
| |
|
|